发明名称 LOADING MECHANISMS
摘要 A processing apparatus (10) has chambers (11 and 12) and a loading mechanism (13) for transferring workpieces into and out of the chambers. The workpieces are carried on a pallet (16) which is slotted so that, when it is inserted into the chambers (11 or 12) the slots are aligned with lines A-H on lifting pins. This arrangement enables the mechanism (13) to withdraw the pallet, whilst the pins (22) are in their erect position.
申请公布号 WO9115032(A1) 申请公布日期 1991.10.03
申请号 WO1991GB00221 申请日期 1991.02.14
申请人 SURFACE TECHNOLOGY SYSTEMS LIMITED 发明人 BRANCHER, CARL, DAVID, MONNINGTON
分类号 H01L21/677;H01L21/687 主分类号 H01L21/677
代理机构 代理人
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