METHOD OF FORMING THIN FILM, APPARATUS FOR FORMING THIN FILM AND SENSOR

摘要

In the manufacture of a substrate with a hydrophobic film used for a reference electrode of an ion sensor or the like, a hydrophobic film is formed on a substrate (6) by irradiating a target (5) consisting of a hydrophobic compound with a neutral atom beam and thereby effecting spattering. The apparatus for effecting the spattering comprises a target base (12) disposed in a vacuum chamber, an atom beam gun (11) for irradiating a target on the target base with a neutral beam, a substrate base (13) and a shutter (14) for controlling the passage of spattered particles. A thin film that is manufactured is suitable for an ion sensor,such as an ISFET or the like or an enzyme sensor.