REDUCED PRESSURE VAPOR GROWTH DEVICE,申请号JP19900016854-传众专利搜索

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发明名称	REDUCED PRESSURE VAPOR GROWTH DEVICE
摘要
申请公布号	JPH03223464(A)	申请公布日期	1991.10.02
申请号	JP19900016854	申请日期	1990.01.25
申请人	NEC CORP	发明人	DEN YASUHIDE
分类号	C23C16/44;H01L21/205;H01L21/31	主分类号	C23C16/44
代理机构		代理人
主权项
地址

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