发明名称 Film exposure apparatus and method of exposure using the same.
摘要 <p>In a film exposure apparatus and method of exposure using the same which are disclosed herein, a plurality of frames arranged in a longitudinal direction of a belt-shaped film are exposed sequentially to light for transcript of an image onto each of the frames. The film exposure apparatus comprises an illumination system, a photomask disposed at a location to which light from the illumination system is applied, a photomask position adjusting mechanism, a projection lens for projecting an image of the photomask irradiated, and a film feed mechanism for step-feeding the film one frame by one frame. The belt-shaped film is provided with at least two or more film-side alignment marks on each frame, and the photomask is provided with a circuit pattern whose image is to be projected and transferred onto the film, and photomask-side alignment marks in correspondence to the film-side alignment marks. &lt;IMAGE&gt;</p>
申请公布号 EP0449180(A2) 申请公布日期 1991.10.02
申请号 EP19910104681 申请日期 1991.03.25
申请人 USHIO DENKI KABUSHIKI KAISHA 发明人 GOTO, MANABU
分类号 G03F7/22;G03F9/00;H05K1/00;H05K1/02;H05K3/00 主分类号 G03F7/22
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