Measuring and controlling deposition on a piezoelectric monitor crystal,申请号GB19900021531-传众专利搜索

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发明名称	Measuring and controlling deposition on a piezoelectric monitor crystal
摘要
申请公布号	GB2242523(A)	申请公布日期	1991.10.02
申请号	GB19900021531	申请日期	1990.10.03
申请人	* LEYBOLD INFICON INC	发明人	ABDUL * WAJID
分类号	C23C14/54;G01B7/06;G01B17/02;G01B17/06	主分类号	C23C14/54
代理机构		代理人
主权项
地址

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