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发明名称
METHOD AND DEVICE FOR CHEMICAL ETCHING FOR METAL
摘要
申请公布号
JPH03223475(A)
申请公布日期
1991.10.02
申请号
JP19900016177
申请日期
1990.01.29
申请人
SUZUKA FUJI XEROX KK
发明人
KATO SEIICHIRO
分类号
C23F1/46;H01L21/306
主分类号
C23F1/46
代理机构
代理人
主权项
地址
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