| 摘要 |
<p>PURPOSE:To realize electric insulation as well as an ultra-high vacuum airtight sealing by providing a first flange of a first piping, a second flange of a second piping, a gasket member of an electric insulating material, and a fastening metal to fasten and fix, and fastening the fastening metal for airtight sealing. CONSTITUTION:A vacuum duct 12 is provided in a metal vacuum box 10, and a flange 13 is provided at the top of the vacuum duct 12. A flange 21 is provided to a vacuum duct 20 at the opposite side. Between the flanges 13 and 21, a gasket 30 of a synthetic resin material or the like with an electric insulating property is held. The outside of the flanges 13 and 21 is fastened and fixed with a clamp metal 40. By fastening a bolt 42 of the clamp metal 40, the gasket 30 is deformed and the airtight sealing between both flanges is accomplished. As a result, the electric insulation between the pipings to be connected each other can be realized while accomplishing the airtight sealing.</p> |
