发明名称 TUNNEL UNIT AND SCANNING HEAD FOR SCANNING TUNNELING MICROSCOPE
摘要 A tunnel unit for a scanning tunneling microscope comprises a specimen stage 120 having a plurality of pole pieces 122 joined together via a joint member 123 formed of a non-magnetic material and a specimen placing surface 120a where the pole pieces and the joint member are exposed, a permanent magnet 121 rotatably inserted within the specimen stage and at the joint of the plurality of pole pieces, a scanning head main body 111, which is provided with a piezoelectric element 113 fixed thereto and a probe 115 mounted on the piezoelectric element, being disposed above the specimen placing surface of the specimen stage and extending across the exposed joint member, and three screws 112 formed of a magnetic material and turnably mounted on the scanning head main body, the screws having their end portions in contact with the specimen placing surface of the specimen stage such as to support the scanning head main body above the specimen placing surface.
申请公布号 EP0373742(A3) 申请公布日期 1991.10.02
申请号 EP19890306245 申请日期 1989.06.20
申请人 MITSUBISHI DENKI KABUSHIKI KAISHA 发明人 NISHIOKA, TADASHI C/O LSI KENKYUSHO;YASUE, TAKAO C/O LSI KENKYUSHO;KOYAMA, HIROSHI C/O LSI KENKYUSHO
分类号 G01N27/00;G01Q10/04;G01Q30/08;G01Q60/16;H01J37/26;(IPC1-7):G01N27/00 主分类号 G01N27/00
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