发明名称 SEMICONDUCTOR WAFER
摘要 <p>PURPOSE:To easily discriminate the correct condition of a blade about its wear by forming a pair of resistance layers parallel to each other along a scribe line on the scribe line which extends in one direction and by providing electrode pads on both sides and on the way of the resistance layers. CONSTITUTION:A pair of resistance layers 5, 6 parallel to each other are formed along a scribe line 3a on the scribe line 3a which extends in one direction and electrode pads 5a-5f and 6a-6f are equipped on both sides and on the way of the resistance layers 5, 6. By measuring the resistance between the electrode pads 5a-5f and 6a-6f which are formed on both sides and on the way of the resistance layers 5, 6, it is easy to grasp which resistance layer is damaged and which portion and to what extent. From the extent of chipping, the necessity of exchanging a blade and the location of chipping can be grasped easily and correctly.</p>
申请公布号 JPH03222449(A) 申请公布日期 1991.10.01
申请号 JP19900018730 申请日期 1990.01.29
申请人 SUMITOMO ELECTRIC IND LTD 发明人 NISHIGUCHI KATSUNORI
分类号 H01L21/78;H01L21/66 主分类号 H01L21/78
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