发明名称 MANUFACTURE OF RESIN-SEALED TYPE SEMICONDUCTOR DEVICE
摘要 PURPOSE:To avoid a defective conduction caused by corrosion of an aluminum electrode by forming an alumina film on the surface of the aluminum electrode to be exposed on the surface of a semiconductor chip after the wire bonding process. CONSTITUTION:After a wire bonding process, an alumina film 13 is formed on the surface of an aluminum electrode 6a which is exposed on the surface of a semiconductor chip 2 by electrolytic analysis, etc. Coated with the alumina film 13, the aluminum electrode 6a is prevented from corroding as a result of acting upon chlorine or other materials which melt from sodium or sealing resin in water. By this method, a defective conduction is prevented from appearing in a resin-sealed type semiconductor device 2 by corrosion of the aluminum electrode 6a.
申请公布号 JPH03222443(A) 申请公布日期 1991.10.01
申请号 JP19900018406 申请日期 1990.01.29
申请人 NEC CORP 发明人 NAKABAYASHI MASAHIKO
分类号 H01L21/60 主分类号 H01L21/60
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