发明名称 SEMICONDUCTOR WAFER
摘要 <p>PURPOSE:To know easily the correct condition of a blade about its wear by forming plural pairs of resistance layers parallel to each other along a scribe line on the scribe line which extends in one direction and by equipping electrodes on both sides of the resistance layers. CONSTITUTION:Plural pairs of resistance layers 5-8 parallel to each other are formed along a scribe line 3a on the scribe line 3a which extends in one direction and electrodes 5a-8a are equipped on both sides of these resistance layers 5-8. By measuring the resistance between the electrode pads 5a-8a and 5b-8b which are formed on both sides of the resistance layer 5-8, it is easy to find which resistance layer is damaged. The extent of chipping, in other words, the damage condition of a diamond blade can be grasped by stages by knowing which resistance layer is damaged.</p>
申请公布号 JPH03222448(A) 申请公布日期 1991.10.01
申请号 JP19900018729 申请日期 1990.01.29
申请人 SUMITOMO ELECTRIC IND LTD 发明人 NISHIGUCHI KATSUNORI
分类号 H01L21/78;H01L21/66 主分类号 H01L21/78
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