| 摘要 |
PURPOSE:To prevent the generation of misdetection due to the readhesion of dust or the like by accumulatively receiving fluorescence generated from a foreign substance such as dust stuck to the surface of a base by a photoelectric conversion element. CONSTITUTION:Far ultraviolet rays generated from a far ultraviolet light source 101 uniformly and simultaneously illuminate the whole area to be inspected on the surface of a reticle 103 through an illuminating system 102. When a foreign substance such as dust stuck to the surface of base of the reticle 103 is irradiated with the far ultraviolet rays, the substance generates fluorescence with a specific wavelength in a visual area in accordance with its constitutional atoms. A detecting optical system 105 forms the contracted image of the reticle face, especially a circuit patterning face, on the surface of the photoelectric conversion element 106. Then, the output of the element 106 is stored in a gate of a control circuit/driver 120 based upon a timing command received from a controller 108 and then outputted. The output is temporarily amplified by an amplifier 121 and then A/D converted by an A/D converter 122. A digital signal from the circuit 122 by a binarizing circuit 123 is lanked in accordance with the existence of size of dust and then stored in a memory 124. |
