METHOD OF OF CHECKING UNIFORMITY AND DOSE VALUE OF ION IMPLANTATION,申请号SU19884625502-传众专利搜索

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发明名称	METHOD OF OF CHECKING UNIFORMITY AND DOSE VALUE OF ION IMPLANTATION
摘要
申请公布号	SU1618222(A1)	申请公布日期	1991.09.30
申请号	SU19884625502	申请日期	1988.11.25
申请人	LIPKES M.YA.,SU;MARTYNOVA E.D.,SU;SIMONOV V.V.,SU	发明人	LIPKES M.YA.,SU;MARTYNOVA E.D.,SU;SIMONOV V.V.,SU
分类号	H01L21/66	主分类号	H01L21/66
代理机构		代理人
主权项
地址

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