METHOD FOR DEPOSITION OF SILICON OXIDE FILM,申请号JP19900014641-传众专利搜索

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发明名称	METHOD FOR DEPOSITION OF SILICON OXIDE FILM
摘要
申请公布号	JPH03219633(A)	申请公布日期	1991.09.27
申请号	JP19900014641	申请日期	1990.01.24
申请人	SHIN ETSU CHEM CO LTD	发明人	SHIMIZU TAKAAKI;YANAGISAWA TOSHIYUKI;TAKITA MASATOSHI
分类号	H01L21/316	主分类号	H01L21/316
代理机构		代理人
主权项
地址

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