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发明名称
SEMICONDUCTOR DEVICE AND MANUFACTURE THEREOF
摘要
申请公布号
JPH03220771(A)
申请公布日期
1991.09.27
申请号
JP19900014874
申请日期
1990.01.26
申请人
MITSUBISHI ELECTRIC CORP
发明人
WAKE SETSUO
分类号
H01L21/302;H01L21/28;H01L21/3065;H01L21/3205;H01L21/336;H01L29/423;H01L29/43;H01L29/49;H01L29/78
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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