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发明名称
VERFAHREN ZUR SELEKTIVEN AUSHAERTUNG EINES FILMS AUF EINEM SUBSTRAT
摘要
申请公布号
DE4109156(A1)
申请公布日期
1991.09.26
申请号
DE19914109156
申请日期
1991.03.20
申请人
PEAK SYSTEMS, INC., FREMONT, CALIF., US
发明人
STULTZ, TIMOTHY J., SAN JOSE, CALIF., US
分类号
H01L21/316;F27B17/00;F27D99/00
主分类号
H01L21/316
代理机构
代理人
主权项
地址
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