METHOD FOR INTRODUCING BASE MATERIAL INTO VACUUM VESSEL,申请号JP19900013945-传众专利搜索

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发明名称	METHOD FOR INTRODUCING BASE MATERIAL INTO VACUUM VESSEL
摘要
申请公布号	JPH03219068(A)	申请公布日期	1991.09.26
申请号	JP19900013945	申请日期	1990.01.24
申请人	MITSUBISHI KASEI CORP	发明人	SHIROSAKA YOSHIYUKI;TAMURA TAKANORI
分类号	C23C14/22;C23C14/24	主分类号	C23C14/22
代理机构		代理人
主权项
地址

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