发明名称 SOLAR CELL INSPECTING EQUIPMENT
摘要 PURPOSE:To make stable defect detection feasible by a method wherein a picture image data picked up from the surfaces of solar cells through an industrial TV camera at the time of oblique and fall lighting are stored in corresponding memories and then a judgment is made based on the subtraction results of binary coded image data. CONSTITUTION:The surfaces of solar cells under respective lighting systems are lighted in oblique and fall lighting being switched by a picture image input control part and the images picked-up by an industrial TV camera 3 are respectively stored in an oblique lighted picture image memory 5 and a direct lighted picture image memory 6 corresponding to the data. Next, the picture image data of the cell electrode part only in the memory 5 and the picture image data of the electrode part together with the defective part in the memory 6 are mutually substracted by a picture image data substracting circuit 7, and the substracted results is binary coded comforming to the specific threshold value by a binary coding circuit 8. Through these procedures, a defect detection part 9 can automatically detect any defect by the binary coded data where the defective part is represented by 1 and the defective part by 0, thereby making the stable defect detection feasible without resorting to any visual inspection.
申请公布号 JPH03218045(A) 申请公布日期 1991.09.25
申请号 JP19900013915 申请日期 1990.01.23
申请人 NEC CORP 发明人 INAZUMI HITOSHI
分类号 H01L31/04;G06T1/00;H01L21/66 主分类号 H01L31/04
代理机构 代理人
主权项
地址