| 摘要 |
PURPOSE:To process an object to be processed with high quality and high yield by providing fixed members and moving members positioned and held spatially at a specified interval to each other by magnetic action, and installing the moving members in an object supporting member. CONSTITUTION:Roller chains 9 are laid over sprockets and turned through right and left outsides of a furnace body 1. Supporting plates 10 are extended respectively on one of outside roller ring plates of the chains 9, both end edge parts of an object loading tube 11 made of quartz or ceramics are fitted onto the shafts 10a of the supporting plates, an object W to be processed is placed on the tube 11, and the object W is conveyed into the furnace body 1 by turning the chains 9. Further, on the roller ring plates of the chains 9, brackets 12 are extended, moving magnets 8 are fixed to the brackets, and fixed magnets 7A and 7B are fixed respectively on the upper plate 14a and the suspended members 15 of a supporting framed bed 14. Thus, since the faces of the magnets 7A, 7B and the magnets 8 having the same polarity are opposed to each other, the magnets 8 are supported by the magnets 7A, 7B in non-contact manner by repulsion force of these magnets. |
