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摘要
申请公布号
JPH03217053(A)
申请公布日期
1991.09.24
申请号
JP19900012275
申请日期
1990.01.22
申请人
SONY CORP
发明人
NOGUCHI TAKASHI;TAJIMA KAZUHIRO
分类号
H01L27/04;H01L21/822;H01L21/8234;H01L21/8238;H01L27/06;H01L27/092
主分类号
H01L27/04
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代理人
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