| 摘要 |
<p>PURPOSE:To prevent a decrease in electric insulation between a terminal and a metal board, to prevent warpage, waviness of an electrostatic chuck body and to prevent a decrease in an attraction force of an article to be chucked by bonding an insulation porcelain to one side of the body at a working temperature of a specific value or lower through an electric insulation melting material. CONSTITUTION:An electrostatic chuck body 2 having a conductor 21 buried in an electric insulation ceramic board 22 and a terminal 25 projecting from one side to supply a voltage to the conductor 21, a metal board 3 bonded to one side of the body 2 and having a terminal hole 31 for externally leading the terminal 25, an insulation porcelain 4 arranged between the outer periphery of the terminal 25 and the inner periphery of the hole 31 are provided. The porcelain 4 is bonded to one side of the body 2 at a working temperature of 800 deg.C or lower through an electric insulation melting material 41. For example, the porcelain 4 is bonded to one side of a green sheet 24 at a working temperature of 500 deg.C or lower through an electric insulation melting material 41 such as an inorganic adhesive material containing a low melting point sealing glass or alumina as a main ingredient.</p> |
