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发明名称
FORMATION OF DIFFRACTION GRATING
摘要
申请公布号
JPH03216602(A)
申请公布日期
1991.09.24
申请号
JP19900011909
申请日期
1990.01.23
申请人
OKI ELECTRIC IND CO LTD
发明人
TSUBOTA TAKASHI;HOSOI YOJI
分类号
G02B5/18;G03F7/00
主分类号
G02B5/18
代理机构
代理人
主权项
地址
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