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发明名称
PRODUCTION OF HIGH-TEMPERATURE SUPERCONDUCTING THIN FILM
摘要
申请公布号
JPH03215304(A)
申请公布日期
1991.09.20
申请号
JP19900007571
申请日期
1990.01.16
申请人
FUJITSU LTD
发明人
MOROHASHI SHINICHI
分类号
C01B13/14;C01G1/00;C23C14/06;C23C14/08;C23C14/22;C23C14/24;C23C16/30;H01B12/06;H01B13/00;H01L39/24
主分类号
C01B13/14
代理机构
代理人
主权项
地址
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