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发明名称
RADIATION-SENSITIVE RESIN COMPOSITION
摘要
申请公布号
KR910007223(B1)
申请公布日期
1991.09.20
申请号
KR19890014650
申请日期
1989.08.06
申请人
JAPAN SYNTHETIC RUBBER CO.,LTD.
发明人
HOSAKA YOSHIHIRO;NOZUE IKUO;DAKADORI MASASIGE;HARITA YOSIYUKI
分类号
G03C1/00;C08K5/28;C08L61/06;G03C1/72;G03F7/004;G03F7/008;G03F7/022;H01L21/027;(IPC1-7):G03F7/008
主分类号
G03C1/00
代理机构
代理人
主权项
地址
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