MEASUREMENT OF FILM THICKNESS,申请号JP19900010490-传众专利搜索

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发明名称	MEASUREMENT OF FILM THICKNESS
摘要
申请公布号	JPH03215957(A)	申请公布日期	1991.09.20
申请号	JP19900010490	申请日期	1990.01.22
申请人	SONY CORP	发明人	ARAKI SHINICHI;KUSUDA TADAHIRO
分类号	H01L21/66;G01B11/06;(IPC1-7):H01L21/66	主分类号	H01L21/66
代理机构		代理人
主权项
地址

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