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发明名称
MICROWAVE DISCHARGE REACTION APPARATUS
摘要
申请公布号
JPH03215659(A)
申请公布日期
1991.09.20
申请号
JP19900009356
申请日期
1990.01.18
申请人
ANELVA CORP
发明人
NAKAGAWA KOJIN
分类号
C23C14/22;H01L21/205;H01L21/302;H01L21/3065
主分类号
C23C14/22
代理机构
代理人
主权项
地址
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