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发明名称
EXPOSURE DEVICE
摘要
申请公布号
JPH03215927(A)
申请公布日期
1991.09.20
申请号
JP19900011527
申请日期
1990.01.20
申请人
CANON INC
发明人
SHIOZAWA TAKANAGA
分类号
G03F7/20;H01L21/027;H01L21/30
主分类号
G03F7/20
代理机构
代理人
主权项
地址
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