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发明名称
THIN FILM FORMING DEVICE
摘要
申请公布号
JPH03215664(A)
申请公布日期
1991.09.20
申请号
JP19900009742
申请日期
1990.01.18
申请人
MATSUSHITA ELECTRIC IND CO LTD
发明人
MURAI TOMOHIKO;NAKAYAMA ICHIRO
分类号
C23C14/35;H01L21/285
主分类号
C23C14/35
代理机构
代理人
主权项
地址
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