| 摘要 |
PURPOSE:To provide the matrix optical switch of multiple terminals having a low loss, small size and high density by providing actuator which defect elastically deformable beams and slightly move the mirrors mounted thereon. CONSTITUTION:The elastically deformable beam 10 which supports the mirror 4 deflects just before the contact of the central part of the elastically deformable beam 10 with the lower part of a waveguide 7 and the mirror 4 moves toward the interior of a gap 8 for a mirror inserting space when a voltage is impressed between electrodes of Al layers 11-1, 11-2 to bend a piezoelectric ZnO layer 12 by a driving adjusting device 14 for the piezoelectric ZnO layer 12. The mirror 4 is thereby positioned with respect to the waveguide 7. The propagated light transmitted through the silicone oil 13 in the gap 8 part for the mirror inserting space is reflected at the intersected point of the waveguide 7 by the mirror 4 and is switched to the orthogonal waveguide. Conversely, the mirror 4 moves toward the outside of the gap 8 for the mirror insertion space and the switching is released when the voltage impression is ceased by the driving adjusting device 14 for the piezoelectric ZnO layer 12. |
