DEVELOPING METHOD FOR RESIST PATTERN AND DEVELOPING DEVICES USING THE SAME,申请号KR19890012482-传众专利搜索

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发明名称	DEVELOPING METHOD FOR RESIST PATTERN AND DEVELOPING DEVICES USING THE SAME
摘要
申请公布号	KR910007226(B1)	申请公布日期	1991.09.20
申请号	KR19890012482	申请日期	1989.08.31
申请人	TOSHIBA CORP.	发明人	MACHUOKA YASUO
分类号	G03F7/30;H01L21/027;H01L21/30;(IPC1-7):G03F7/26;H01L21/00	主分类号	G03F7/30
代理机构		代理人
主权项
地址

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