| 摘要 |
PURPOSE:To allow the correction of performance by a post treatment by working one of the boundary faces of a waveguide layer to a curved surface shape in a part of the region of a waveguide layer grating forming part to eliminate errors. CONSTITUTION:The pattern of the prescribed grating 1 is formed on the waveguide layer 3 provided on a substrate 2 and the error from a design value is detected by inspecting the light condensing performance. A rugged part 3a is formed atop the waveguide layer 3 of the part where the grating 1 is formed so as to eliminate the error when the error is detected. The performance is corrected without changing the design value of the grating or without correcting the device even when the error of the design value occures at the time of the grating formation and the imaging performance degrades by post-treating. |
