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发明名称
SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH03214626(A)
申请公布日期
1991.09.19
申请号
JP19900008247
申请日期
1990.01.19
申请人
HITACHI LTD
发明人
KANEKO TADAO;KURODA TAKARO;MIYAZAKI TAKAO
分类号
H01L21/316;H01L21/283;H01L21/338;H01L29/812
主分类号
H01L21/316
代理机构
代理人
主权项
地址
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