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发明名称
MANUFACTURE OF COMPOUND SEMICONDUCTOR CRYSTAL AND MANUFACTURE OF OPTICAL DETECTION ELEMENT
摘要
申请公布号
JPH03214635(A)
申请公布日期
1991.09.19
申请号
JP19900010146
申请日期
1990.01.18
申请人
FUJITSU LTD
发明人
SAITO TETSUO;KAWACHI TETSUYA;YAMAMOTO KOSAKU;YAMAMOTO TAMOTSU;MAEKAWA TORU
分类号
H01L31/10;H01L21/363
主分类号
H01L31/10
代理机构
代理人
主权项
地址
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