DEEP ULTRAVIOLET RAY PHOTORESIST COMPOSITE CONTAINING POLYCYCLIC CYCLOPENTANE-2- DIAZO-1, 3-DIONE

摘要

PURPOSE: To ensure peak absorption in a deep UV region by mixing a specified resin binder soluble or swellable in an aq. alkali soln. and a specified compd. with a solvent compsn. CONSTITUTION: A photosensitive compsn. is obtd. by mixing a resin binder insoluble in water but soluble or swellable in an aq. alkali soln. and a compd. represented by formula I, II, etc., with an enough solvent compsn. to prepare a practically uniform mixture. The amt. of the resin binder and that of the compd. are about 65-98% and about 2-35% of the weight of the photosensitive compsn. except the solvent compsn., respectively. The photosensitive compsn. can be imagewise exposed with UV in the range of about 200-300nm.