| 摘要 |
<p>PURPOSE:To prepare objective gas in low cost by a simple apparatus by utilizing the gas stream generated when the high pressure gas in one adsorbing tank is discharged to the atmosphere to reduce the pressure in the other adsorbing tank to a pressure lower than atmospheric pressure. CONSTITUTION:The high pressure gas in an adsorbing tank 10c is discharged to the atmosphere through the first exhaust pipe 6c and the primary side 8c of an air ejector 8. Whereupon, negative pressure is generated on the primary side 8b of the air ejector 8 by the gas stream ejected on the primary side 8a of the air ejector 8 and the gas on the secondary side 8b is sucked in the gas on the primary side 8a to be discharged to the atmosphere along with the gas on the primary side. As a result, the pressure in an adsorbing tank 10b in an atmospheric pressure state is reduced to a pressure lower than atmospheric pressure through the second exhaust pipe 7 and the second exhaust valve 4b. By this constitution, the manufacturing cost of objective gas is reduced without requiring power for reducing pressure.</p> |
