发明名称 Tool exchange system for hybrid die bonder.
摘要 <p>A tool exchange system for a hybrid die bonder, in particular an automatic hybrid die bonder, comprises a head (14) which is adapted to pick up a selected tool holder (40) fitted with a tool (48), from a tool bank comprising a plurality of tool holders. The tool holder (40) and head (14) are fitted with co-operating centering means for precise positioning of the tool holder (40) on the head (14). The system further comprises means for driving the head between the tool bank, a die eject station of the hybrid die bonder and a mounting station, and means for indexing the tool bank to index a selected tool holder (40) to a station at which it can be picked up by the head (14). <IMAGE></p>
申请公布号 EP0447087(A1) 申请公布日期 1991.09.18
申请号 EP19910301769 申请日期 1991.03.04
申请人 EMHART INC. 发明人 SCHWEITZER, KARL;ZEINDL, GERHARD
分类号 B23Q3/155;H01L21/00;H01L21/52;H01L21/677 主分类号 B23Q3/155
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