| 摘要 |
PURPOSE: To provide an accelerometer which provides a constant buffering effect even when a surrounding temperature changes by providing a means for detecting movement to a deflection end part of a cantilever beam provided on a base material and making a leg part provided at the end part to be submerged in a self-standing type viscous material. CONSTITUTION: A magnet 26 is provide at a deflection end part 18 of a cantilever beam 14, and a Hall chip 28 which generates a signal corresponding to the movement of magnet 26 is provided an a base material 12. In addition, at the end part 18, two leg parts 30 which extend toward the base material 12 are provided, and an end part 32 of the leg part 30 is submerged in a silicon gel 44 deposited on the base material 12. Thus, thanks to a deformation of the gel 44 caused by movement of the leg part 30 and elastic characteristics to return to its original state, buffering effect is obtained. An buffering amount is changed with the width of leg part 30 and the used amount of gel 44. Thus, an accelerometer wherein its buffering effect is immune to the effect of surrounding temperature is provided. |
