发明名称 |
Strip-line for propagating microwave energy |
摘要 |
A device for propagating microwave energy to a plasma discharge tube from an antenna coupled to a microwave generator includes a hollow rectangular conduit and a strip-line resonator or strip-line conductor disposed therein. The discharge tube is mounted perpendicular to and through a central opening in the strip-line resonator and is disposed at a distance, from one end of the strip-line where the antenna is located, of one-half the wavelength of the microwave energy and one-quarter wavelength from the opposite end. The strip-line is attached to one end of the rectangular conduit and is supported by a dielectric member at a point one-quarter wavelength from the antenna. Microwave energy is propagated from the antenna by the strip-line dimensioned to the resonant frequency of the microwave the energy. A gas, such as argon or helium, is introduced into the discharge tube and is ionized by microwave energy to form a plasma.
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申请公布号 |
US5049843(A) |
申请公布日期 |
1991.09.17 |
申请号 |
US19900508707 |
申请日期 |
1990.04.12 |
申请人 |
BARNES, RAMON M.;RESZKE, EDWARD R. |
发明人 |
BARNES, RAMON M.;RESZKE, EDWARD R. |
分类号 |
H01J37/32;H01P5/04 |
主分类号 |
H01J37/32 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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