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发明名称
Aluminum nitride powder and process for preparation of the same
摘要
申请公布号
US5049367(A)
申请公布日期
1991.09.17
申请号
US19890417104
申请日期
1989.10.04
申请人
SUMITOMO CHEMICAL CO., LIMITED
发明人
NAKANO, KAZUHIKO;MURASE, MITSUTOSHI;MATSUDA, NORIO;MURAKAMI, HIDEAKI
分类号
C01B21/072;H01L21/48
主分类号
C01B21/072
代理机构
代理人
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地址
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