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发明名称
Semiconductor integrated circuit device and a method for manufacturing the same
摘要
申请公布号
US5049967(A)
申请公布日期
1991.09.17
申请号
US19900631907
申请日期
1990.12.21
申请人
HITACHI, LTD.
发明人
WATANABE, ATSUO;IKEDA, TAKAHIDE;TSUKUDA, KIYOSHI;HIRAO, MITSURU;MUKAI, TOUJI;KAMEI, TATSUYA
分类号
H01L27/08;H01L21/8249;H01L27/06;H01L27/118;H01L29/68;H01L29/78
主分类号
H01L27/08
代理机构
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