| 摘要 |
<p>PURPOSE:To carry a wafer in a clean atmosphere even in a vacuum and to simplify its transfer mechanism by inserting and housing a rotor, which is in such combination that it becomes the same polarity and has the dimensions smaller than the cylindrical hole of the main body, in the cylindrical hole of the main body. CONSTITUTION:The cylindrical main body 1 is magnetized, and there the left side is the N pole 1a, and the right side is S pole 1b, and a rotor 2 is set in the arrow direction in the hollow of this main body 1. At this time, the rotor 2 is the one with which certain space can be maintained. The rotor is of the material having magnetism similar to the main body 1, and has the N pole 2a on the left and the S pole on the right 2b. Since the fellow same poles repel each other with the properties of magnetism, unless it is held with external force, it slips in the reverse direction to the arrow, but the dead weight of the rotor has the force of floating by magnetic force. In the case that the dead weight is smaller than the floating force, the rotor floats in the air, and the direct contact with the main body disappears. The diameter d of the rotor 2 is smaller than the diameter D of the main body, and it maintains clearances 8a1 to 8a4 respectively around itself, and the transfer of the work is done at the cylindrical end (both sides or one side).</p> |
