发明名称 |
Electronic circuit device and method of manufacturing same |
摘要 |
Plural semiconductor elements are buried into an insulating substrate, and top surfaces of semiconductor elements and the substrate are in a same plane. A photosensitive dry film is covered on surfaces of the substrate and semiconductor elements. The photosensitive dry film has openings corresponding to electrodes of semiconductor elements, and conductors are filled in openings of the photosensitive dry film. The device has the multi-layer wiring construction without damaging to semiconductor elements arranged on the substrate.
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申请公布号 |
US5049980(A) |
申请公布日期 |
1991.09.17 |
申请号 |
US19880181526 |
申请日期 |
1988.04.14 |
申请人 |
KABUSHIKI KAISHA TOSHIBA |
发明人 |
SAITO, TAMIO;OHUCHI, MASAYUKI;NIITSUMA, AKIRA |
分类号 |
H01L23/52;H01L21/48;H01L21/768;H01L23/13;H01L23/14;H01L23/498;H01L23/522;H01L23/538 |
主分类号 |
H01L23/52 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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