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发明名称
RESIST STRUCTURE
摘要
申请公布号
JPH03211722(A)
申请公布日期
1991.09.17
申请号
JP19900004451
申请日期
1990.01.16
申请人
OKI ELECTRIC IND CO LTD
发明人
SUZUKI TSUMORU
分类号
G03F7/11;H01L21/027
主分类号
G03F7/11
代理机构
代理人
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