DEVICE FOR MEASURING DIFFERENTIAL PRESSURE

摘要

PURPOSE: To enable an accurate measurement result even when using a preceeding body connected to a single chamber type differential pressure sensor by allowing an evaluation circuit to contain another compensation device which compensates the effect on sensor differential pressure which is compensated by the first compensation device for a preceeding body temperature and preceeding body parameter. CONSTITUTION: A single chamber type differential pressure sensor 10 is connected to at least one preceeding body 30 including a volume where a fluid is filled, and the volume is closed with one of two vibration plates 12 and 13 at its one side, and it is closed with an elastic preceeding body vibration plate 12 at its other side. An evaluation circuit contains, for respective preceeding bodies 30, another compensation device which compensates the effect on the sensor differential pressure which was compensates by the first compensation device for preceeding body temperature and preceeding body parameter.