| 摘要 |
PURPOSE:To produce the captioned heating cathode which is excellent in electron emissivity and sputtering resistance and does not generate a spark even if a high voltage is applied on said cathode, by introducing into said cathode the oxides of alkaline-earth metal elements, the oxides of alkali metal elements and/ or the oxides of rare earth elements that are emitter material whose work function is small and whose wear caused by ion impulse is also small. CONSTITUTION:A liquid or paste is thus prepared by mixing 1-50wt% of more than one kind of organic metal selected from the alkoxide and carboxylic salts group containing such metal which may be any one of alkaline-earth metal elements, alkali metal elements or rare earth elements, 5-95wt% of more than one kind of organic solvent selected from alcohol, ester or the like, and more than one kind of substance selected from higher alcohol-system high boiling point substance, glyceride, polyhydric alcohol whose boiling point is 150-400 deg.C, or the like; when said liquid or paste is stuck onto a cathode substrate 2 said organic metal is decompoed by heating and an amorphous emitter layer 3 including more than one kind of metal oxide selected from the oxides of alkaline-earth elements, the oxides of alkali metal elements and the oxides of rare earth elements is formed and stuck onto said cathode substrate. |
