| 摘要 |
<p>PURPOSE:To improve the purging efficiency at the time of the forced feed operation of a liquid source and to prevent the contamination of a material to be treated by attaching a purge line and a purge valve to a liquid source container and providing these line and valve in proximity to the container body. CONSTITUTION:The purge valve 22 is closed and forced feeding gas supply stop valves 20, 24 and liquid source discharge valves 21, 25 are opened to pass a pressurized inert gas into a forced feeding gas supply line 18 and to introduce this gas into the liquid source container body 17 in the process for forced feeding the liquid source. The liquid source 13 is pressurized and is discharged from a liquid source discharge line 19 through a continuous piping 16 to a baking system 1. The liquid source 13 is mainly evaporated in a tank 3 and is introduced by vacuum evacuation into a reaction furnace via a flow rate controller 4. The 2nd forced feeding gas supply stop valve 24, the purge valve 22 and the 2nd liquid source discharge valve 25 are closed in succession to purge drying and the liquid source container 26 is disconnected by joints 27a, 27b in the case of removal of the liquid source container 26.</p> |
