METHOD FOR RECOGNIZING WAFER CARRIER,申请号JP19900004191-传众专利搜索

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发明名称	METHOD FOR RECOGNIZING WAFER CARRIER
摘要
申请公布号	JPH03209710(A)	申请公布日期	1991.09.12
申请号	JP19900004191	申请日期	1990.01.11
申请人	SEIKO EPSON CORP	发明人	SATO MASASHI
分类号	H01L21/02	主分类号	H01L21/02
代理机构		代理人
主权项
地址

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