发明名称 SURFACE ROUGHENING METHOD
摘要 <p>A surface roughening method, preferably for a substrate of a solar cell, comprising coating the substrate with a photoresist material having light-shielding particles mixed therein, exposing and developing the photoresist coating and then etching the substrate with a suitable etchant.</p>
申请公布号 EP0180222(B1) 申请公布日期 1991.09.11
申请号 EP19850113869 申请日期 1985.10.31
申请人 FUJI ELECTRIC CORPORATE RESEARCH AND DEVELOPMENT LTD. 发明人 UENO, MASAKAZU FUJI ELECTRIC CORPORATE RESEARCH;KATO, TOSHIAKI FUJI ELECTRIC CORPORATE RESEARCH
分类号 H01L31/04;C03C15/00;H01L21/302;H01L21/308;H01L31/0236;H01L31/052 主分类号 H01L31/04
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