| 摘要 |
PURPOSE:To improve the storage property of the compsn. for a resist by incorporating enzyme into the above compsn. CONSTITUTION:A resin (A), a photosensitive agent and enzyme (B) are incorporated into this compsn. A novolak resin is preferably used for the component A and ribonuclease is used for the component B. The desired resolution is attained even if the compsn. is preserved over a long period of time by adding the component B to the compsn. |
