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发明名称
MANUFACTURING DEVICE FOR SEMICONDUCTOR
摘要
申请公布号
JPH03208334(A)
申请公布日期
1991.09.11
申请号
JP19900002710
申请日期
1990.01.10
申请人
FUJITSU LTD
发明人
HARAJIRI SHUICHI
分类号
C23C16/44;H01L21/22
主分类号
C23C16/44
代理机构
代理人
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地址
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